德國BURKERT氣體質量流量測量儀簡介

上海乾拓貿易有限公司

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the user is able to switch between these two gases. This instrument communicates with master devices digitally,

 (-10 to +60°C with oxygen) Ambient temperature -10 to +50°C Accuracy ±0.8% o.R. ±0.3% F.S. 

(after 1 min. warm up time) Repeatability ±0.1% F.S. Response time (t95%) < 300 ms Materials 

當前流量將通過 RS 通訊輸出。可針對兩種不同的氣體對型號 8703 進行校準，

用戶可在兩者之間進行轉換。根據用戶要求的不同，

質量流量測量儀用于在工藝技術領域直接測量氣體通過量。

 no further A/D conversions needed. The MassFlowCommunicator software can be used for parameterisation and diagnosis.

Technical Data Nominal ? ow range1) (Qnominal)

緊湊型結構和數字通訊

? Direct flow measurement by  MEMS- Technology for nominal flow rates  from 10 mlN/min to 80 lN/min (N2) 

? High accuracy ? Short response time ? Compact design and digital communication

Mass ? ow meter are used in process technology for the direct measurement of the mass ? ow of gases. 

采用半導體傳感器技術的直接流量測量裝置，適合額定流量范圍 20 mlN/min 至 80 lN/min (N2)

在體積流量測量儀中，還需要測量溫度和壓力或密度，

Body Housing Seals Aluminium or stainless steel Metal FKM, EPDM Port connection NPT 1/4, G 1/4, screw-in ? tting or sub-base, others on reques 

In case of volumetric ? ow meters, it is necessary to measure the temperature and the pressure or the density,

 because gases change their density or rather their volume depending on the pressure. 

因為氣體的密度或體積會因壓力的不同而發生變化。

 The digital mass ? ow meter type 8703 uses a sensor on silicon chip basis located directly in contact with the gas.  

Due to the fact that the sensor is directly in the bypass channel a very fast response time of the MFM is reached.  

The actual ? ow is given over RS485-communication. Type 8703 can optionally be calibrated for two different gases, 

與介質相接觸接頭的材料可確保裝置能配合所有常見工藝氣體運行。

 The measurement of the mass ? ow, on the other hand, is independent of the pressure and temperature.   

10 mlN/min 2) to 80 lN/min (N2), see table on p. 2 Turn-down ratio 1:50, higher turn-down ratio on request 

Operating gas Neutral, non-contaminated gases, on request Calibration gas Operating gas or air with conversion factor Max.

 operating pressure (Inlet pressure) 10 bar (145 psi) depending on the ori? ce of the valve Gas temperature -10 to +70°C

與之相反，質量流量的測量并不取決于壓力和溫度。

8703 型數字式質量流量測量儀具有一個以硅芯片為基礎的傳感器（參見 2 頁的描述），

Electr. connection Plug D-Sub 9-pin Power supply 24V DC Voltage tolerance ±10% Residual ripple < 2% Power

 consumption 5 W Communication Digital via RS485 (half-duplex or fullduplex), 

RS422 Protection class IP40 Dimensions [mm] see drawings p. 5-6 Total weight ca. 500 g (aluminium body)

 Installation horizontal or vertical Light emitting diodes (default functions, other functions programmable) 

Indication for power, limit and error Binary Input (default, other functions programmable) Not assigned Binary Output 

 (default, other functions programmable) One relay-output for Limit (process value close to full scale value) Max. load: 25V, 1A, 25VA

反應快速

該傳感器直接在氣體流中進行測量。通過這種方式可以達到非常短的設備反應時間。

德國BURKERT氣體質量流量測量儀簡介